A novel electrochemical anodization cell for the synthesis of mesoporous silicon
- A novel design of an electrochemical anodization cell dedicated to the synthesis of mesoporous, single-crystalline silicon is presented. First and foremost, the design principle follows user safety since electrochemical etching of silicon requires highly hazardous electrolytes based on hydrofluoric (HF) acid. The novel cell design allows for safe electrolyte handling prior, during, and post-etching. A peristaltic pump with HF-resistant fluoroelastomer tubing transfers electrolytes between dedicated reservoirs and the anodization cell. Due to the flexibility of the cell operation, different processing conditions can be realized providing a large parameter range for the attainable sample thickness, its porosity, and the mean pore size. Rapid etching on the order of several minutes to synthesize micrometer-thick porous silicon epilayers on bulk silicon is possible as well as long-time etching with continuous, controlled electrolyte flow for several days to prepare up to 1000 mu m thick self-supporting porous silicon membranes. A highlyA novel design of an electrochemical anodization cell dedicated to the synthesis of mesoporous, single-crystalline silicon is presented. First and foremost, the design principle follows user safety since electrochemical etching of silicon requires highly hazardous electrolytes based on hydrofluoric (HF) acid. The novel cell design allows for safe electrolyte handling prior, during, and post-etching. A peristaltic pump with HF-resistant fluoroelastomer tubing transfers electrolytes between dedicated reservoirs and the anodization cell. Due to the flexibility of the cell operation, different processing conditions can be realized providing a large parameter range for the attainable sample thickness, its porosity, and the mean pore size. Rapid etching on the order of several minutes to synthesize micrometer-thick porous silicon epilayers on bulk silicon is possible as well as long-time etching with continuous, controlled electrolyte flow for several days to prepare up to 1000 mu m thick self-supporting porous silicon membranes. A highly adaptable, LabVIEW((TM))-based control software allows for user-defined etching profiles.…
Verfasserangaben: | Natalia Katarzyna Gostkowska-LeknerORCiDGND, Dirk WallacherORCiDGND, Nico Grimm, Klaus HabichtORCiDGND, Tommy Hofmann |
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DOI: | https://doi.org/10.1063/5.0008536 |
ISSN: | 0034-6748 |
ISSN: | 1089-7623 |
Pubmed ID: | https://pubmed.ncbi.nlm.nih.gov/33138555 |
Titel des übergeordneten Werks (Englisch): | Review of scientific instruments : a monthly journal devoted to scientific instruments, apparatus, and techniques |
Verlag: | American Institute of Physics |
Verlagsort: | Melville, NY |
Publikationstyp: | Wissenschaftlicher Artikel |
Sprache: | Englisch |
Datum der Erstveröffentlichung: | 22.10.2020 |
Erscheinungsjahr: | 2020 |
Datum der Freischaltung: | 23.05.2023 |
Band: | 91 |
Ausgabe: | 10 |
Aufsatznummer: | 105113 |
Seitenanzahl: | 6 |
Fördernde Institution: | DFG German Research Foundation (DFG)European Commission [402553194] |
Organisationseinheiten: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
DDC-Klassifikation: | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
Peer Review: | Referiert |
Publikationsweg: | Open Access / Hybrid Open-Access |