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Atomic force microscopy nanolithography fabrication of metallic nano-slits using silicon nitride tips

  • In this paper, we report on the properties of nano-slits created in metal thin films using atomic force microscope (AFM) nanolithography (AFM-NL). We demonstrate that instead of expensive diamond AFM tips, it is also possible to use low cost silicon nitride tips. It is shown that depending on the direction of scratching, nano-slits of different widths and depths can be fabricated at constant load force. We elucidate the reasons for this behavior and identify an optimal direction and load force for scratching a gold layer.

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Metadaten
Author:Tobias König, Thomas Papke, Alexey Kopyshev, Svetlana SanterORCiDGND
DOI:https://doi.org/10.1007/s10853-013-7188-x
ISSN:0022-2461 (print)
Parent Title (English):Journal of materials science
Publisher:Springer
Place of publication:New York
Document Type:Article
Language:English
Year of first Publication:2013
Year of Completion:2013
Release Date:2017/03/26
Volume:48
Issue:10
Pagenumber:7
First Page:3863
Last Page:3869
Funder:DFG [SA1657/4-1]
Organizational units:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie
Peer Review:Referiert