X-ray grazing-incidence study of inhomogeneous strain relaxation in Si/SiGe wires
| Author details: | Ullrich Pietsch, A. Hesse, Y. Zhuang, Vaclav Holý, Jochen Stangl, S. Zerlauth, F. Schaffler, Günther Bauer |
|---|---|
| ISSN: | 0168-583X |
| Publication type: | Article |
| Language: | English |
| Year of first publication: | 2003 |
| Publication year: | 2003 |
| Release date: | 2017/03/24 |
| Source: | Nuclear instruments and methods in physics research : Section B, Beam interactions with materials and atoms. - ISSN 0168-583X. - 200 C (2003), S. 267 - 272 |
| Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
| Peer review: | Referiert |
| Institution name at the time of the publication: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |
