X-ray grazing-incidence study of inhomogeneous strain relaxation in Si/SiGe wires
Author details: | Ullrich Pietsch, A. Hesse, Y. Zhuang, Vaclav Holý, Jochen Stangl, S. Zerlauth, F. Schaffler, Günther Bauer |
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ISSN: | 0168-583X |
Publication type: | Article |
Language: | English |
Year of first publication: | 2003 |
Publication year: | 2003 |
Release date: | 2017/03/24 |
Source: | Nuclear instruments and methods in physics research : Section B, Beam interactions with materials and atoms. - ISSN 0168-583X. - 200 C (2003), S. 267 - 272 |
Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
Peer review: | Referiert |
Institution name at the time of the publication: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |