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Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching
- Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.
Author details: | Claudia PacholskiORCiDGND, Vivechana AgarwalORCiD, Ruth Fabiola Balderas-ValadezGND |
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URN: | urn:nbn:de:kobv:517-opus4-394426 |
Publication series (Volume number): | Zweitveröffentlichungen der Universität Potsdam : Mathematisch-Naturwissenschaftliche Reihe (316) |
Publication type: | Postprint |
Language: | English |
Date of first publication: | 2016/02/17 |
Publication year: | 2016 |
Publishing institution: | Universität Potsdam |
Release date: | 2017/03/30 |
Tag: | fourier-transform spectroscopy; nanostructures; nanowires |
Number of pages: | 5 |
First page: | 21430 |
Last Page: | 21434 |
Source: | RSC Adv. (2016) Nr. 6, 21430-21434. - DOI: 10.1039/C5RA26816H |
Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Chemie |
DDC classification: | 5 Naturwissenschaften und Mathematik / 54 Chemie / 540 Chemie und zugeordnete Wissenschaften |
Peer review: | Referiert |
Publishing method: | Open Access |
Grantor: | RSC |
License (English): | Creative Commons - Namensnennung 3.0 Unported |