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A confocal set-up for three-dimensional (3D) micro X-ray fluorescence (micro-XRF) was used at the mySpot beamline at BESSY II, which allows compositional depth profiling for various applications. We present results obtained with a confocal 3D micro-XRF set-up for chemical age dating using the U, Th and Pb concentrations of monazite within rock thin sections. The probing volume was determined to be approximately 21 x 21 x 24 mu m(3) for W-L alpha using an excitation energy of 19 keV. The relative detection limits particularly for Pb are below 10 ppm (for Counting times