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High-resolution, large-area three-dimensional mapping of polarization profiles in electret polymers was carried out by means of a fast thermal pulse technique with a focused laser beam. A lateral resolution of 38 mu m and a near- surface depth resolution of less than 0.5 mu m was achieved. At larger depths, fast thermal diffusion in the metal electrode rather than the laser spot size becomes the limiting factor for the lateral resolution. (c) 2005 American Institute of Physics