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We combine sensitivity to atomic number, chemical shifts, probing depth, and magnetic order in a field- dependent magnetic circular X-ray dichroism study at the Mn L-edge of the diluted ferromagnetic semiconductor Ga1-xMnxAs and observe different Mn constituents: ferromagnetic Mn with an n(d) > 5 lineshape and paramagnetic Mn with distinct n(d) = 5 lineshape. The paramagnetic Mn is assigned to interstitials with surface segregation tendency. (c) 2005 Elsevier B.V. All rights reserved