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X-ray scattering from silicon surfaces

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Author details:Ralph Stömmer, H. Göbel, W. Hub, Ullrich Pietsch
Publication type:Article
Language:English
Year of first publication:1998
Publication year:1998
Release date:2017/03/24
Source:Semiconductor international. - 1 (1998), S. 81 - 88
Organizational units:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie
Institution name at the time of the publication:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik
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