In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
Author details: | Y. Zhuang, Ullrich Pietsch, Jochen Stangl, Vaclav Holý, Nora Darowski, Jörg Grenzer, S. Zerlauth, F. Schäffler, Günther Bauer |
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Publication type: | Article |
Language: | English |
Year of first publication: | 2000 |
Publication year: | 2000 |
Release date: | 2017/03/24 |
Source: | Physica / B. - 283 (2000), S. 130 - 134 |
Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
Institution name at the time of the publication: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |