In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
| Author details: | Y. Zhuang, Ullrich Pietsch, Jochen Stangl, Vaclav Holý, Nora Darowski, Jörg Grenzer, S. Zerlauth, F. Schäffler, Günther Bauer |
|---|---|
| Publication type: | Article |
| Language: | English |
| Year of first publication: | 2000 |
| Publication year: | 2000 |
| Release date: | 2017/03/24 |
| Source: | Physica / B. - 283 (2000), S. 130 - 134 |
| Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
| Institution name at the time of the publication: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |
