Influence of the deposition rate on the structure of thin metal layers
Author details: | P. Haier, B. A. Herrmann, N. Esser, Ullrich Pietsch, K. Lüders, W. Richter |
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Publication type: | Article |
Language: | English |
Year of first publication: | 1998 |
Publication year: | 1998 |
Release date: | 2017/03/24 |
Source: | Thin solid films. - 318 (1998), S. 233 |
Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
Institution name at the time of the publication: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |