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X-ray scattering from silicon surfaces and thin oxides on silicon substrates

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Author details:Ralph Stömmer
Publication type:Doctoral Thesis
Language:English
Year of first publication:1998
Publication year:1998
Release date:2017/03/24
Number of pages:108 S. : graph. Darst.
Organizational units:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie
Institution name at the time of the publication:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik
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