X-ray scattering from silicon surfaces
Author details: | Ralph Stömmer, H. Göbel, W. Hub, Ullrich Pietsch |
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Publication type: | Article |
Language: | English |
Year of first publication: | 1998 |
Publication year: | 1998 |
Release date: | 2017/03/24 |
Source: | Semiconductor international. - 1 (1998), S. 81 - 88 |
Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
Institution name at the time of the publication: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |