Nondestructive analysis of a lateral GaAs nanostructure buried under AlGaAs using conventional high resolution and grazing incidence X-ray diffraction
Author details: | Nora Darowski, Ullrich Pietsch, Ute Zeimer, V. Smirnitzki, F. Bugge |
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Publication type: | Article |
Language: | English |
Year of first publication: | 1998 |
Publication year: | 1998 |
Release date: | 2017/03/24 |
Source: | Journal of applied physics. - 84 (1998), 3, S. 1366 |
Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
Institution name at the time of the publication: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |