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Sensitivity analysis of ellipsometry applied to uniaxial optical films

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Author details:C. Flueraru, Sigurd Schrader, V. Zauls, H. Motschmann
Publication type:Article
Language:English
Year of first publication:2000
Publication year:2000
Release date:2017/03/24
Source:Thin solid films. - 379 (2000), 1/2, S. 15 - 22
Organizational units:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie
Institution name at the time of the publication:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik
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