@article{HennebergChiGeueetal.2001, author = {Henneberg, Oliver and Chi, Li Feng and Geue, Thomas and Saphiannikova, Marina and Pietsch, Ullrich and Rochon, Paul and Natansohn, Almeria}, title = {Atomic force microscopy inspection of the early state of formation of polymer surface relief grating}, year = {2001}, language = {en} }