@article{BoggioBodenmuellerFrembergetal.2014,
  author    = {Boggio, Jose M. Chavez and Bodenmueller, D. and Fremberg, T. and Haynes, R. and Roth, Martin M. and Eisermann, R. and Lisker, M. and Zimmermann, L. and Boehm, Michael},
  title     = {Dispersion engineered silicon nitride waveguides by geometrical and refractive-index optimization},
  series = {Journal of the Optical Society of America : B, Optical physics},
  volume    = {31},
  journal   = {Journal of the Optical Society of America : B, Optical physics},
  number    = {11},
  publisher = {Optical Society of America},
  address   = {Washington},
  issn      = {0740-3224},
  doi       = {10.1364/JOSAB.31.002846},
  pages     = {2846 -- 2857},
  year      = {2014},
  abstract  = {Dispersion engineering in silicon nitride (SiXNY) waveguides is investigated through the optimization of the waveguide transversal dimensions and refractive indices in a multicladding arrangement. Ultraflat dispersion of -84.0 +/- 0.5 ps/nm/km between 1700 and 2440 nm and 1.5 +/- 3 ps/nm/km between 1670 and 2500 nm is numerically demonstrated. It is shown that typical refractive index fluctuations as well as dimension fluctuations during fabrication of the SiXNY waveguides are a limitation for obtaining ultraflat dispersion profiles. Single- and multicladding waveguides are fabricated and their dispersion profiles measured (over nearly 1000 nm) using a low-coherence frequency domain interferometric technique. By appropriate thickness optimization, the zero-dispersion wavelength is tuned over a large spectral range in single-and multicladding waveguides with small refractive index contrast (3\%). A flat dispersion profile with +/- 3.2 ps/nm/km variation over 500 nm is obtained in a multicladding waveguide fabricated with a refractive index contrast of 37\%. Finally, we generate a nearly three-octave supercontinuum in this dispersion flattened multicladding SiXNY waveguide. (C) 2014 Optical Society of America},
  language  = {en}
}