@article{KoenigPapkeKopyshevetal.2013, author = {Tobias K{\"o}nig and Thomas Papke and Alexey Kopyshev and Svetlana Santer}, title = {Atomic force microscopy nanolithography fabrication of metallic nano-slits using silicon nitride tips}, journal = {Journal of materials science}, volume = {48}, number = {10}, pages = {3863 -- 3869}, doi = {10.1007/s10853-013-7188-x}, year = {2013}, }