@article{SchroeterRitterHolschneideretal.2016, author = {M-A Schroeter and M. Ritter and Matthias Holschneider and H. Sturm}, title = {Enhanced DySEM imaging of cantilever motion using artificial structures patterned by focused ion beam techniques}, journal = {Journal of micromechanics and microengineering}, volume = {26}, doi = {10.1088/0960-1317/26/3/035010}, year = {2016}, }