Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching
- Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.
| Author details: | Ruth Fabiola Balderas-ValadezGND, Vivechana AgarwalORCiD, Claudia PacholskiORCiDGND |
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| DOI: | https://doi.org/10.1039/c5ra26816h |
| ISSN: | 2046-2069 |
| Title of parent work (English): | RSC Advances |
| Publisher: | Royal Society of Chemistry |
| Place of publishing: | Cambridge |
| Publication type: | Article |
| Language: | English |
| Year of first publication: | 2016 |
| Publication year: | 2016 |
| Release date: | 2020/03/22 |
| Volume: | 6 |
| Number of pages: | 5 |
| First page: | 21430 |
| Last Page: | 21434 |
| Funding institution: | CONACyT [188657, 329812]; Max Planck Society; BMBF (PhoNA) [03IS2101E] |
| Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Chemie |
| Peer review: | Referiert |
