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Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

  • Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.

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Metadaten
Author:Claudia PacholskiORCiDGND, Vivechana Agarwal, Ruth Fabiola Balderas-Valadez
URN:urn:nbn:de:kobv:517-opus4-394426
Series (Serial Number):Postprints der Universität Potsdam : Mathematisch-Naturwissenschaftliche Reihe (316)
Document Type:Postprint
Language:English
Date of first Publication:2016/02/17
Year of Completion:2016
Publishing Institution:Universität Potsdam
Release Date:2017/03/30
Tag:fourier-transform spectroscopy; nanostructures; nanowires
Pagenumber:5
First Page:21430
Last Page:21434
Source:RSC Adv. (2016) Nr. 6, 21430-21434. - DOI: 10.1039/C5RA26816H
Organizational units:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Chemie
Dewey Decimal Classification:5 Naturwissenschaften und Mathematik / 54 Chemie / 540 Chemie und zugeordnete Wissenschaften
Peer Review:Referiert
Publication Way:Open Access
Grantor:RSC
Licence (English):License LogoCreative Commons - Attribution 3.0 unported