Atomic force microscopy nanolithography fabrication of metallic nano-slits using silicon nitride tips
- In this paper, we report on the properties of nano-slits created in metal thin films using atomic force microscope (AFM) nanolithography (AFM-NL). We demonstrate that instead of expensive diamond AFM tips, it is also possible to use low cost silicon nitride tips. It is shown that depending on the direction of scratching, nano-slits of different widths and depths can be fabricated at constant load force. We elucidate the reasons for this behavior and identify an optimal direction and load force for scratching a gold layer.
| Author details: | Tobias König, Thomas Papke, Alexey KopyshevORCiDGND, Svetlana SanterORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1007/s10853-013-7188-x |
| ISSN: | 0022-2461 |
| Title of parent work (English): | Journal of materials science |
| Publisher: | Springer |
| Place of publishing: | New York |
| Publication type: | Article |
| Language: | English |
| Year of first publication: | 2013 |
| Publication year: | 2013 |
| Release date: | 2017/03/26 |
| Volume: | 48 |
| Issue: | 10 |
| Number of pages: | 7 |
| First page: | 3863 |
| Last Page: | 3869 |
| Funding institution: | DFG [SA1657/4-1] |
| Organizational units: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik und Astronomie |
| Peer review: | Referiert |
