TY  - JOUR
A1  - Jordan, Grace
A1  - McCarthy, Denis N.
A1  - Schlepple, N.
A1  - Krissler, Jan
A1  - Schroeder, H.
A1  - Kofod, Guggi
T1  - Actuated micro-optical submount using a dielectric elastomer actuator
JF  - IEEE ASME transactions on mechatronics
N2  - Analysis of the operating characteristics of a dielectric elastomer actuator (DEA) submount for the high-precision positioning of optical components in one dimension is presented. Precise alignment of a single-mode fiber is demonstrated and variation of the sensitivity of the submount motion by changing the bias voltage is confirmed. A comparison of the performance of the DEA submount with a piezoelectric alignment stage is made, which demonstrates that DEAs could present a very attractive, low-cost alternative to currently used manual technologies in overcoming the hurdle of expensive packaging of single-mode optical components.
KW  - Actuators
KW  - manufacturing automation
KW  - optical interconnections
KW  - packaging
KW  - position control
Y1  - 2011
U6  - https://doi.org/10.1109/TMECH.2010.2089991
SN  - 1083-4435
VL  - 16
IS  - 1
SP  - 98
EP  - 102
PB  - Inst. of Electr. and Electronics Engineers
CY  - Piscataway
ER  -