TY  - GEN
A1  - Pacholski, Claudia
A1  - Agarwal, Vivechana
A1  - Balderas-Valadez, Ruth Fabiola
T1  - Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching
N2  - Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.
T3  - Zweitveröffentlichungen der Universität Potsdam : Mathematisch-Naturwissenschaftliche Reihe - 316 
KW  - fourier-transform spectroscopy
KW  - nanostructures
KW  - nanowires
Y1  - 2016
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:517-opus4-394426
SP  - 21430
EP  - 21434
ER  -