TY  - JOUR
A1  - König, Tobias
A1  - Papke, Thomas
A1  - Kopyshev, Alexey
A1  - Santer, Svetlana
T1  - Atomic force microscopy nanolithography fabrication of metallic nano-slits using silicon nitride tips
JF  - Journal of materials science
N2  - In this paper, we report on the properties of nano-slits created in metal thin films using atomic force microscope (AFM) nanolithography (AFM-NL). We demonstrate that instead of expensive diamond AFM tips, it is also possible to use low cost silicon nitride tips. It is shown that depending on the direction of scratching, nano-slits of different widths and depths can be fabricated at constant load force. We elucidate the reasons for this behavior and identify an optimal direction and load force for scratching a gold layer.
Y1  - 2013
U6  - https://doi.org/10.1007/s10853-013-7188-x
SN  - 0022-2461
VL  - 48
IS  - 10
SP  - 3863
EP  - 3869
PB  - Springer
CY  - New York
ER  -