TY  - JOUR
A1  - Schroeter, M-A
A1  - Ritter, M.
A1  - Holschneider, Matthias
A1  - Sturm, H.
T1  - Enhanced DySEM imaging of cantilever motion using artificial structures patterned by focused ion beam techniques
JF  - Journal of micromechanics and microengineering
N2  - We use a dynamic scanning electron microscope (DySEM) to map the spatial distribution of the vibration of a cantilever beam. The DySEM measurements are based on variations of the local secondary electron signal within the imaging electron beam diameter during an oscillation period of the cantilever. For this reason, the surface of a cantilever without topography or material variation does not allow any conclusions about the spatial distribution of vibration due to a lack of dynamic contrast. In order to overcome this limitation, artificial structures were added at defined positions on the cantilever surface using focused ion beam lithography patterning. The DySEM signal of such high-contrast structures is strongly improved, hence information about the surface vibration becomes accessible. Simulations of images of the vibrating cantilever have also been performed. The results of the simulation are in good agreement with the experimental images.
KW  - FIB patterning
KW  - structured cantilever
KW  - AFM
KW  - modal analysis
KW  - DySEM
Y1  - 2016
U6  - https://doi.org/10.1088/0960-1317/26/3/035010
SN  - 0960-1317
SN  - 1361-6439
VL  - 26
PB  - IOP Publ. Ltd.
CY  - Bristol
ER  -