TY  - JOUR
A1  - Balderas-Valadez, Ruth Fabiola
A1  - Agarwal, Vivechana
A1  - Pacholski, Claudia
T1  - Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching
JF  - RSC Advances
N2  - Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.
Y1  - 2016
U6  - https://doi.org/10.1039/c5ra26816h
SN  - 2046-2069
VL  - 6
SP  - 21430
EP  - 21434
PB  - Royal Society of Chemistry
CY  - Cambridge
ER  -