TY - JOUR A1 - Pietsch, Ullrich A1 - Hesse, A. A1 - Zhuang, Y. A1 - Holý, Vaclav A1 - Stangl, Jochen A1 - Zerlauth, S. A1 - Schaffler, F. A1 - Bauer, Günther T1 - X-ray grazing-incidence study of inhomogeneous strain relaxation in Si/SiGe wires Y1 - 2003 SN - 0168-583X ER -