@article{SchroeterSturmHolschneider2013,
  author    = {Schr{\"o}ter, M-A and Sturm, H. and Holschneider, Matthias},
  title     = {Phase and amplitude patterns in DySEM mappings of vibrating microstructures},
  series = {Nanotechnology},
  volume    = {24},
  journal   = {Nanotechnology},
  number    = {21},
  publisher = {IOP Publ. Ltd.},
  address   = {Bristol},
  issn      = {0957-4484},
  doi       = {10.1088/0957-4484/24/21/215701},
  pages     = {10},
  year      = {2013},
  abstract  = {We use a dynamic scanning electron microscope (DySEM) to analyze the movement of oscillating micromechanical structures. A dynamic secondary electron (SE) signal is recorded and correlated to the oscillatory excitation of scanning force microscope (SFM) cantilever by means of lock-in amplifiers. We show, how the relative phase of the oscillations modulate the resulting real part and phase pictures of the DySEM mapping. This can be used to obtain information about the underlying oscillatory dynamics. We apply the theory to the case of a cantilever in oscillation, driven at different flexural and torsional resonance modes. This is an extension of a recent work (Schroter et al 2012 Nanotechnology 23 435501), where we reported on a general methodology to distinguish nonlinear features caused by the imaging process from those caused by cantilever motion.},
  language  = {en}
}
@article{SchroeterHolschneiderSturm2012,
  author    = {Schr{\"o}ter, M-A and Holschneider, Matthias and Sturm, H.},
  title     = {Analytical and numerical analysis of imaging mechanism of dynamic scanning electron microscopy},
  series = {Nanotechnology},
  volume    = {23},
  journal   = {Nanotechnology},
  number    = {43},
  publisher = {IOP Publ. Ltd.},
  address   = {Bristol},
  issn      = {0957-4484},
  doi       = {10.1088/0957-4484/23/43/435501},
  pages     = {10},
  year      = {2012},
  abstract  = {The direct observation of small oscillating structures with the help of a scanning electron beam is a new approach to study the vibrational dynamics of cantilevers and microelectromechanical systems. In the scanning electron microscope, the conventional signal of secondary electrons (SE, dc part) is separated from the signal response of the SE detector, which is correlated to the respective excitation frequency for vibration by means of a lock-in amplifier. The dynamic response is separated either into images of amplitude and phase shift or into real and imaginary parts. Spatial resolution is limited to the diameter of the electron beam. The sensitivity limit to vibrational motion is estimated to be sub-nanometer for high integration times. Due to complex imaging mechanisms, a theoretical model was developed for the interpretation of the obtained measurements, relating cantilever shapes to interaction processes consisting of incident electron beam, electron-lever interaction, emitted electrons and detector response. Conclusions drawn from this new model are compared with numerical results based on the Euler-Bernoulli equation.},
  language  = {en}
}