@article{LuebbertBaumbachPontietal.1999, author = {L{\"u}bbert, Daniel and Baumbach, Tilo and Ponti, S. and Pietsch, Ullrich and Leprince, L. and Schneck, J. and Talneau, A.}, title = {Strain investigation of low strained buried gratings by grazing incidence X-Ray diffraction and the theory of elasticity}, year = {1999}, language = {en} }