@article{DarowskiPietschZeimeretal.1998, author = {Darowski, Nora and Pietsch, Ullrich and Zeimer, Ute and Smirnitzki, V. and Bugge, F.}, title = {Nondestructive analysis of a lateral GaAs nanostructure buried under AlGaAs using conventional high resolution and grazing incidence X-ray diffraction}, year = {1998}, language = {en} }