@article{SokolovHuangSenfetal.2019, author = {Sokolov, Andrey and Huang, Qiushi and Senf, Friedmar and Feng, Jiangtao and Lemke, Stephanie and Alimov, Svyatoslav and Knedel, Jeniffa and Zeschke, Thomas and Kutz, Oliver and Seliger, Tino and Gwalt, Grzegorz and Sch{\"a}fers, Franz and Siewert, Frank and Kozhevnikov, Igor and Qi, Runze and Zhang, Zhong and Li, Wenbin and Wang, Zhanshan}, title = {Optimized highly efficient multilayer-coated blazed gratings for the tender X-ray region}, series = {Optics express : the international electronic journal of optics}, volume = {27}, journal = {Optics express : the international electronic journal of optics}, number = {12}, publisher = {Optical Society of America}, address = {Washington}, issn = {1094-4087}, doi = {10.1364/OE.27.016833}, pages = {16833 -- 16846}, year = {2019}, abstract = {The optimized design of multilayer-coated blazed gratings (MLBG) for high-flux tender X-ray monochromators was systematically studied by numerical simulations. The resulting correlation between the multilayer d-spacing and grating blaze angle significantly deviated from the one predicted by conventional equations. Three high line density gratings with different blaze angles were fabricated and coated by the same Cr/C multilayer. The MLBG with an optimal blaze angle of 1.0 degrees showed a record efficiency reaching 60\% at 3.1 keV and 4.1 keV. The measured efficiencies of all three gratings were consistent with calculated results proving the validity of the numerical simulation and indicating a more rigorous way to design the optimal MLBG structure. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.}, language = {en} }