@article{ZhuangPietschStangletal.2000, author = {Zhuang, Y. and Pietsch, Ullrich and Stangl, Jochen and Hol{\´y}, Vaclav and Darowski, Nora and Grenzer, J{\"o}rg and Zerlauth, S. and Sch{\"a}ffler, F. and Bauer, G{\"u}nther}, title = {In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction}, year = {2000}, language = {en} }