@phdthesis{Mehdorn1995,
  author    = {Mehdorn, Falk},
  title     = {Plasmagest{\"u}tzte Erzeugung d{\"u}nnner ionischer Schichten},
  pages     = {105 S. : graph. Darst},
  year      = {1995},
  language  = {de}
}