@article{KoenigPapkeKopyshevetal.2013,
  author    = {K{\"o}nig, Tobias and Papke, Thomas and Kopyshev, Alexey and Santer, Svetlana},
  title     = {Atomic force microscopy nanolithography fabrication of metallic nano-slits using silicon nitride tips},
  series = {Journal of materials science},
  volume    = {48},
  journal   = {Journal of materials science},
  number    = {10},
  publisher = {Springer},
  address   = {New York},
  issn      = {0022-2461},
  doi       = {10.1007/s10853-013-7188-x},
  pages     = {3863 -- 3869},
  year      = {2013},
  abstract  = {In this paper, we report on the properties of nano-slits created in metal thin films using atomic force microscope (AFM) nanolithography (AFM-NL). We demonstrate that instead of expensive diamond AFM tips, it is also possible to use low cost silicon nitride tips. It is shown that depending on the direction of scratching, nano-slits of different widths and depths can be fabricated at constant load force. We elucidate the reasons for this behavior and identify an optimal direction and load force for scratching a gold layer.},
  language  = {en}
}