@article{ZhuangPietschStangletal.2000, author = {Y. Zhuang and Ullrich Pietsch and Jochen Stangl and Vaclav Hol{\´y} and Nora Darowski and J{\"o}rg Grenzer and S. Zerlauth and F. Sch{\"a}ffler and G{\"u}nther Bauer}, title = {In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction}, year = {2000}, }